Semiconductor device having silicon on stressed liner (sol)

ABSTRACT

A method of fabricating an integrated circuit and an integrated circuit having silicon on a stress liner are disclosed. In one embodiment, the method comprises providing a semiconductor substrate comprising an embedded disposable layer, and removing at least a portion of the disposable layer to form a void within the substrate. This method further comprises depositing a material in that void to form a stress liner, and forming a transistor on an outside semiconductor layer of the substrate. This semiconductor layer separates the transistor from the stress liner. In one embodiment, the substrate includes isolation regions; and the removing includes forming recesses in the isolation regions, and removing at least a portion of the disposable layer via these recesses. In one embodiment, the depositing includes depositing a material in the void via the recesses. End caps may be formed in the recesses at ends of the stress liner.

RELATED APPLICATIONS

This application is a continuation of copending application Ser. No.13/365,764, which is a divisional of U.S. application Ser. No.12/575,962, filed Oct. 8, 2009. The disclosures of application Ser. Nos.13/365,764 and 12/575,962 are hereby incorporated herein by reference intheir entireties.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to semiconductor devices forintegrated circuits, and more particularly to such semiconductor deviceshaving a stress liner to enhance the performance of the devices.

2. Background Art

In general, semiconductor devices include integrated circuits havingcomplementary pairs of P-channel transistors and N-channel transistorsformed on a common semiconductor substrate. As is generally known in theart, CMOS technologies are typically used to fabricate IC (integratedcircuit) chips for high density and high-performance applications dueto, e.g., the high operation efficiency, high switching speed, and goodscaling properties that are characteristic of CMOS devices.Technological innovations in semiconductor fabrication technologies aredriving market demands for CMOS solutions for higher speed, higherintegration density, and lower power applications. The downscaling ofCMOS technologies to submicron design rules and beyond, however, posestechnological challenges with respect to maintaining performance andreliability. For example, as device sizes are downscaled, CMOStransistors must be formed with, e.g., thinner gate electrodes, smallerchannel lengths, and shallower drain/source extension diffusion regions.This downscaling generally results in transistors having higher channelresistance and higher junction/contact parasitic resistances, leading todegraded performance.

To mitigate the impact on device performance with downscaling, variousstate of the art CMOS fabrication techniques can be implemented toeffectively reduce parasitic gate and junction resistances and increasechannel conductivity. For example, DSL (dual stress liner) techniquescan be incorporated in CMOS process flows as a means to enhanceperformance of highly-scaled CMOS devices. In general, DSL technologiesare premised on findings that the application of compressive stress tothe conduction channel of a P-type transistor can improve the carrier(holes) mobility within the channel, while the application of tensilestress to the conduction channel of an N-type transistor can improve thecarrier (electrons) mobility within the channel. In this regard, variousDSL techniques have been developed to form a compressive stressinsulating liner over the gate structure of P-type transistors whileforming tensile stress insulating liners over the gate structures ofN-type transistor devices, so as to increase charge carrier mobility inthe channels of the complementary transistors.

The deliberate introduction of strain into a silicon MOSFET channel hasbecome an important route for improving device performance in CMOStechnologies. Stress is typically coupled into the channel from thesource/drain regions. However, as gate pitch is reduced in order toincrease density, the size of the source/drain regions are shrinkingrapidly, limiting the efficacy of such methods. Furthermore, inthin-body devices, the use of embedded source/drain elements to createstress is also not effective, due the difficulty of embedding stressedmaterials into a thin substrate that can effectively couple stress intothe channel.

One alternative to using source/drain regions to create stress is to usestressed gate materials, which can transfer stress directly to thechannel beneath it. However, the important role of the gate in both theprocessing used for device formation and the proper electricalfunctioning of the device results in extremely restrictive constraintson materials that can be considered for use in the gate, making theincorporation of significant stress difficult.

BRIEF SUMMARY

Embodiments of the invention provide a method of fabricating anintegrated circuit and an integrated circuit having Silicon on astressed liner. In one embodiment, the method comprises providing asemiconductor substrate comprising an outer semiconductor layer, and anembedded disposable layer beneath said outer semiconductor layer;removing at least a portion of the embedded disposable layer to form avoid within the substrate, beneath said semiconductor layer; depositinga material in said void to form a stress liner within the substrate; andforming a transistor on said outer semiconductor layer. Thesemiconductor layer of the substrate separates the transistor from thestress liner.

In one embodiment, the substrate includes isolation regions; and theremoving at least a portion of the disposable layer includes formingrecesses in said isolation regions, and removing at least a portion ofthe disposable layer via said recesses. In one embodiment, thedepositing includes depositing said material in the void via saidrecesses, and the depositing a material in the void includes adding endcaps in said recesses at lateral ends of the stress liner.

In an embodiment, the disposable layer is a SiGe layer. In oneembodiment, the stress liner is a compressive stress layer. In oneembodiment, the stress liner is a tensile stress layer.

In an embodiment, the providing the semiconductor substrate includesforming the disposable layer in the semiconductor substrate. Thisforming may be done by epitaxially growing an SiGe layer on a surface ofthe substrate, and epitaxially growing the semiconductor layer on theSiGe layer. Also, in an embodiment, the forming the transistor includesimplanting ions in the surface of the substrate to form source and drainregions, and annealing the substrate to activate the ions. In oneembodiment, the annealing is done after the removing at least a portionof the disposable layer, and before the depositing the material in thevoid.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 shows a ground plant (GP) implant in a semiconductor structure.

FIG. 2 illustrates SiGe and Si layers epitaxial grown in a recess formedin the semiconductor structure of FIG. 1.

FIG. 3 depicts a gate formed on the semiconductor structure.

FIG. 4 shows a disposable spacer on the gate, and a source/drainimplant.

FIG. 5 shows an offset spacer around the gate of the semiconductorstructure.

FIG. 6 illustrates recesses formed in isolation regions of thesemiconductor structure.

FIG. 7 depicts removal of an SiGe layer from the semiconductorstructure.

FIG. 8 shows an annealing step.

FIG. 9 illustrates formation of a stress layer inside the semiconductorstructure.

DETAILED DESCRIPTION

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, in order to provide a thoroughunderstanding of the present invention. However, it will be appreciatedby one of ordinary skill in the art that the invention may be practicedwith a wide range of specific details. In other instances, well-knownstructures or processing steps have not been described in detail inorder to avoid obscuring the invention.

The present invention relates to ICs. More particularly, the presentinvention relates to integrated circuits having stress liners whichimprove reliability and performance without incurring area penalties orlayout inefficiencies. The invention can be applied to various types ofICs, such as memory devices including dynamic random access memories(DRAMs), static random access memories (SRAMs), non-volatile memoriesincluding programmable read-only memories (PROM) and flash memories,optoelectronic devices, logic devices, communication devices, digitalsignal processors (DSPs), microcontrollers, system-on-chip, as well asother types of devices.

FIG. 1 illustrates a semiconductor substrate 10 that may be aconventional semiconductor substrate including isolation regions 14. Thebase semiconductor substrate 10 may comprise any semiconductor materialincluding, but not limited to: Si, SiC, SiGe, SiGeC, Ge alloys, GaAs,InAs, InP, other III-V or II-VI compound semiconductors, or organicsemiconductor structures. In some embodiments of the present invention,the base semiconductor substrate 10 may be comprised of a Si-containingsemiconductor material, i.e., a semiconductor material that includessilicon. Further, the base semiconductor substrate 10 may be doped orcontain both doped and undoped regions. Although the base semiconductorsubstrate 10 may be a bulk semiconductor structure, it may also includea layered structure with one or more buried insulator layers (notshown).

Isolation regions 14 are provided to separate the structure shown inFIG. 1 from adjacent semiconductor structures. In one embodiment, theisolation regions comprise shallow trench isolation (STI) regions. STIscomprise trenches formed in the substrate 10 and filled with dielectricmaterial, such as silicon oxide. Other types of isolation regions mayalso be used. For example, trenches 14 may be formed by lithography andetching.

The lithography step includes applying a photoresist to the surface ofthe substrate 10, exposing the photoresist and developing the exposedphotoresist using a conventional resist developer. The etching step usedin forming the trenches 14 may includes any standard Si directionalreactive ion etch process. Other dry etching processes such as plasmaetching, ion beam etching and laser ablation may also be employed.Portions of the substrate 10 that are protected by the patternedphotoresist are not removed during etching. After etching, the patternedphotoresist is removed utilizing a conventional resist strippingprocess.

A high energy, ground plant (GP) implant is performed to form a layer 16of high concentration silicon within the semiconductor substrate 10. Anysuitable GP procedure may be used to form layer 16.

Next, with reference to FIG. 2, after high concentration layer 16 isformed, the portion of substrate 10 above that layer is etched away toform a recess at the top of the semiconductor recess. Then, a SiGe layer18 is epitaxially grown on layer 16, and a Si layer 20 is grown on thatSiGe layer 18. Any suitable procedures may be used to form this recessand to grow epitaxially layers 18 and 20.

The recess etch may be any suitable etch process. For instance, astandard plasma etch machine may be used at a temperature of 40-100° C.,a pressure of 1-10 torr, and with HBr, CF₄, and O₂ precursor gases.

The epitaxial SiGe layer 18 may be formed by any suitable standardprocess. For example, reduced-temperature chemical vapor deposition(“RTCVD”), ultra-high vacuum chemical vapor deposition (“UHCVD”),molecular beam epitaxy (“MBE”), or a small or large batch furnace-basedprocess may be used. For example, a silicon-bearing precursor DCS(dichlorosilane), a germanium-bearing precursor GeH₄ (germane), and ap-doping precursor B₂H₆ (diborane) may be used to grow a SiGe layer.Alternatively, the epitaxial deposition process may also include acarbon-bearing precursor SiH₃CH₃ (mono-methyl-silane). As an example, aRTCVD process may be used at a temperature range of 450-800° C. and apressure between 1-100 torr.

The silicon layer 20 is epitaxially grown on the SiGe layer 18. The Silayer may comprise any semiconducting material including, but notlimited to Si, strained Si, SiC, SiGe, SiGeC, Si alloys, Ge, Ge alloys,GaAs, InAs, and InP, or any combination thereof. A number of differentsources may be used for the deposition of epitaxial silicon. Siliconsources for epitaxial growth include silicon tetrachloride,dichlorosilane (SiH₂Cl₂), and silane (SiH₄). The temperature forepitaxial silicon deposition typically ranges from 550° C. to 900° C.Although a higher temperature typically results in faster deposition,the faster deposition may result in crystal defects and film cracking.

A gate region is then formed. With reference to FIGS. 3-5, a blanketlayer of gate dielectric 22 is formed on the surface of the layer 20.The gate dielectric 22 is comprised of an insulating material having adielectric constant of, for example, about 4.0 or greater. In oneembodiment, dielectric 22 may have a dielectric constant greater than7.0. The dielectric constants mentioned herein are relative to a vacuum,unless otherwise stated. Note that SiO₂ typically has a dielectricconstant that is about 4.0. Specifically, the gate dielectric 22employed in the present invention includes, but is not limited to: anoxide, nitride, oxynitride and/or silicates including metal silicates,aluminates, titanates and nitrides. In one embodiment, the gatedielectric 22 may be comprised of an oxide such as, for example, SiO₂,HfO₂, ZrO₂, Al₂O₃, TiO₂, La₂O₃, SrTiO₃, LaAlO₃, Y₂O₃ and mixturesthereof.

The gate dielectric 22 can be formed by a thermal growing process suchas, for example, oxidation. Alternatively, the gate dielectric 22 can beformed by a deposition process such as, for example, chemical vapordeposition (CVD), plasma-assisted CVD, atomic layer or pulsed deposition(ALD or ALPD), evaporation, reactive sputtering, chemical solutiondeposition or other like deposition processes. The gate dielectric 22may also be formed utilizing any combination of the above processes.

The physical thickness of the gate dielectric 22 may vary, buttypically, the gate dielectric 22 has a thickness from about 0.5 toabout 10 nm, with a thickness from about 0.5 to about 2 nm being moretypical.

After forming the gate dielectric 22, a blanket layer of polysilicon oranother gate conductor material or combination thereof, which becomesthe gate conductor 24 shown in FIG. 3, is formed on the gate dielectric22 utilizing a known deposition process such as, for example, physicalvapor deposition, CVD or evaporation. The thickness, i.e., height, ofthe gate conductor 24 deposited at this point of the process may varydepending on the deposition process employed. Typically, the gateconductor 24 has a vertical thickness from about 20 to about 180 nm,with a thickness from about 40 to about 150 nm being more typical.

The gate conductor 24 can comprise any conductive material that istypically employed as a gate of a CMOS structure. Illustrative examplesof such conductive materials that can be employed as the gate conductor24 include, but are not limited to: polysilicon, conductive metals orconductive metal alloys, conductive suicides, conductive nitrides,polySiGe and combinations thereof, including multilayers thereof. Insome embodiments, a barrier layer may be formed between multiple layersof gate conductors.

The blanket layer of gate conductor material 24 may be doped or undoped.If doped, an in-situ doping deposition process may be employed informing the same. Alternatively, a doped gate conductor layer can beformed by deposition, ion implantation and annealing. Illustrativeexamples of dopant ions include As, P, B, Sb, Bi, In, Al, Ga, Ti ormixtures thereof. Typical doses for the ion implants are 1E14 (=1×10¹⁴)to 1E16 (=1×10¹⁶) atoms/cm² or more typically 1E15 to 5E15 atoms/cm².This implant, it may be noted, is optional.

With reference to FIG. 4, a disposable spacer 26 may be used during thedoping of the gate conductor. With the embodiment shown in FIG. 4, thedisposable spacer 26 is formed over the sidewalls of the gate electrode24. The disposable spacer can be comprised of any suitable material; andfor example this spacer can be comprised of photoresist, organicmaterial, or anti-reflective coating (ARC) organic material. Forexample, an Anti-Reflective Coating can be comprised of a material suchas propylene glycol monomethyl ether. The disposable spacer can beformed by forming an organic layer (such as a ARC layer) over thesubstrate and gate structure. Then the organic layer may beanisotropically RIE etched to form the disposable spacer. For example,the disposable spacer 26 can have a width between 10 and 1000 angstroms.

An optional dielectric cap (not shown), such as an oxide or a nitride,may be formed on the gate conductor 24. The optional dielectric cap istypically removed before or immediately after the diffusion regions tobe subsequently formed have been silicided. A conventional depositionprocess such as CVD or PECVD can be used in forming this optionaldielectric cap. When present, the optional dielectric cap may have athickness from about 10 to about 50 nm.

Next, diffusion regions 32 and 34 are formed utilizing a conventionaldeep ion implantation process. The diffusion regions 32, 34, whichsubsequently become the source/drain regions, may have a junction depththat is less than 50 nm. The diffusion regions are present on each sideof the gate structure 22, 24, 26 at the footprint thereof. The regionbetween the diffusion regions 32, 34 directly beneath the gate structure22, 24, 26 is the device channel 36.

The blanket gate conductor 24, the gate dielectric 22 and optionally thedielectric cap are then patterned by lithography and etching so as toprovide at least one patterned gate region shown in FIG. 5 at 40. When aplurality of patterned gate regions are present, the patterned gateregions may have the same dimension, i.e., length, or they can havevariable dimensions to improve device performance. Each patterned gateregion at this point of the fabrication process may include at least astack of the gate conductor 24 and the gate dielectric 22. Thelithography step includes applying a photoresist to the upper surface ofthe gate conductor 24, exposing the photoresist to a desired pattern ofradiation and developing the exposed photoresist utilizing aconventional resist developer.

The pattern in the photoresist is then transferred to the blanket layerof gate conductor 24 and the gate dielectric 22 utilizing one or moredry etching steps. In some embodiments, the patterned photoresist may beremoved after the pattern has been transferred into the blanket layer ofgate conductor 24. When an optional dielectric cap is present, thephotoresist may be applied to the cap and the above processing isperformed.

Suitable dry etching processes that can be used in forming the patternedgate region 40 include, but are not limited to: reactive-ion etching,ion beam etching, plasma etching or laser ablation. A wet or dry etchingprocess can also be used to remove portions of the gate dielectric 22that are not protected by the patterned gate conductor 24.

Disposable spacer 26 is removed and, with reference to FIG. 5, an offsetspacer (i.e., diffusion spacer) 42 is formed on exposed sidewalls ofeach patterned gate region. The offset spacer 42 is comprised of aninsulator such as an oxide, nitride, oxynitride, or carbon-containingsilicon oxide, nitride, oxynitride, and/or any combination thereof. Theoffset spacer 42 can be formed by deposition and etching or by thermaltechniques.

The width of the offset spacer 42 may be adjusted to compensate fordifferent diffusion rates of p-type dopants and n-type dopants that areused in forming the diffusion regions 32 and 34. Typically, the offsetspacer 42 has a lateral width from about 3 to about 20 nm, with alateral width from about 7 to about 15 nm being even more typical. Insome embodiments, the width of the offset spacer can be scaled below 3nm or even eliminated if an advanced thermal process such as a laseranneal is used in activating the dopants within the diffusion regions32, 34.

A halo implant may be performed at this point of the process utilizing aconventional halo ion implantation process. Although a halo ionimplantation can be used, it does not represent the formation of anotherdiffusion region. The structure including the diffusion regions 32 and34 and offset spacer 42 is shown in FIG. 5. Alternatively, for devicesilicon thickness under 10 nm, a halo implant is not typically requiredas the device threshold voltage becomes controlled more strongly by thegate electrode.

The next step, illustrated in FIG. 6, is a selective etching of theisolation trenches 14 to form recesses 46, until lateral access isprovided to the SiGe layer 18. This etching may be performed in aconventional manner, for example by an anisotropic plasma etch. Theprocess then continues, as illustrated in FIG. 7, with the removal ofthe SiGe layer 18

by selective lateral etching. SiGe can be removed, either by oxidizingchemistry (such as by etching with a solution having 40 ml of 70%HNO₃+20 ml of H₂O₂+5 ml of 0.5% HF) or by isotropic plasma etching.

FIG. 7 illustrates a view of the substrate 10 after the etching of thetrenches 14 and lateral etching of the SiGe layer 18. In the activeregions, there is an empty void 44 under the silicon epilayer 20, andmore specifically, directly beneath channel region 36. Layer 20 and gateregion 40 may be physically supported above void 44 in any suitable way.For instance, layer 12 may be anchored at STI regions (not shown)located above and below the plane of FIG. 7. Also, supports (not shown)may be located around the void 44 to maintain the structure.

With reference to FIG. 8, after the SiGe is removed, an annealing stepis performed to activate ions at the source and drain regions 32, 34.Any suitable annealing process may be employed, and for instance, aRapid Thermal Anneal (RTA) may be used. For example, the structure maybe put into the chamber of the RTA device, and heated to a temperaturerange between 300° C. and 600° C. for 1 to 5 minutes in an N₂ and O₂environment. This treatment may be carried out at 0.5 to 1.5 atm usingthe N₂ and O₂ gas, respectively.

With reference to FIGS. 8 and 9, void 44 is then filled with a materialor materials for the purpose of fabricating a stress liner. In oneembodiment, the stress inducing material comprises a tensile stressinducing material, and, for example, silicon nitride may be used. Thethickness of the tensile stress layer, for example, is about 400-1000 Åand preferably about 500 Å. Other thicknesses may also be useful.Various techniques can be used to form the tensile stress layer. Forexample, the first stress layer can be formed using chemical depositiontechniques, such as low pressure CVD (LPCVD), plasma enhanced CVD(PECVD), rapid thermal CVD (RTCVD) or BTBAS-based CVD. The tensilestress layer, in accordance with one embodiment of the invention, may bedeposited by PECVD using a SiH₄ precursor.

In another embodiment, the stress layer comprises compressive stressmaterial, and, for example, silicon nitride may also be used to form acompressive stress layer. Typically, the thickness of the stress layeris about 400-1000 Å. Preferably, the thickness of the second stresslayer is about 600 Å. Other thicknesses are also useful. Varioustechniques, such as low pressure CVD (LPCVD), plasma enhanced CVD(PECVD), high density plasma CVD (HDPCVD), rapid thermal CVD (RTCVD) orBTBAS-based CVD can be used to form the second stress layer. In oneembodiment, the second stress layer is formed by HDPCVD using a silane(SiH₄) precursor.

In another embodiment, both tensile and compressive stress liners may beformed in void 44. In this embodiment, substrate 10 may be provided withboth P-type and N-type transistors, with the P-type transistor directlyabove the compressive stress liner, and the N-type transistor directlyabove the tensile stress liner.

After the stress liner is formed, silicide may be added at the ends ofthe stress liner to form end caps 60. The process then continues withthe filling of the trenches 14 with a dielectric. This dielectric may bethe same as that used in the STI process.

Additional process steps may then be used, as desired, to obtain afinished structure. For instance, a final spacer 62 may be added aroundgate structure 22, 24, and a top silicon layer 64 may be added on thesemiconductor substrate. Spacer 62 and layer 64 may be formed or addedin any suitable way, and, for example, conventional techniques may beused.

Also, a buried oxide (BOX) layer may be formed in substrate 10. A BOXlayer may be formed in any suitable way. For instance, the initialsubstrate 10 can be formed using a layer transfer process, such as abonding process, in which a BOX is formed. Alternatively, a techniquereferred to as separation by implanted oxygen (SIMOX) can be used toform a BOX layer. In this process, ions, typically oxygen, are implantedinto a bulk Si-containing substrate, and then the substrate containingthe implanted ions is annealed under conditions that are capable offorming a buried insulating layer, i.e., BOX. The device illustrated inFIG. 9 is then obtained.

While the present invention has been particularly shown and describedwith respect to preferred embodiments thereof, it will be understood bythose skilled in the art that changes in forms and details may be madewithout departing from the spirit and scope of the present invention. Itis therefore intended that the present invention not be limited to theexact forms and details described and illustrated herein, but fallwithin the spirit and scope of the appended claims.

What is claimed is:
 1. A method of forming a transistor in an integratedcircuit including a semiconductor substrate having an innersemiconductor layer, an outer semiconductor layer, and an embeddeddisposable layer above said inner semiconductor layer and beneath saidouter semiconductor layer, the method comprising: forming a transistoron said outer semiconductor layer; removing at least a portion of theembedded disposable layer to form a void within the substrate, belowsaid transistor; depositing a stress inducing material in said void toform a stress liner within the substrate; and during said depositing,the outer semiconductor layer of the substrate maintaining thetransistor separated from the stress layer.
 2. The method according toclaim 1, wherein: the forming a transistor includes forming a gatedielectric above the outer semiconductor layer; and the removingincludes removing the at least a portion of the embedded disposablelayer after forming the gate dielectric.
 3. The method according toclaim 2, wherein the forming a transistor includes: forming source anddrain regions in the outer semiconductor layer; and activating thesource and drain regions after removing the at least a portion of theembedded disposable layer.
 4. The method according to claim 3, whereinthe depositing a stress inducing material includes depositing the stressinducing material in the void after activating the source and drainregions.
 5. The method according to claim 4, wherein the forming sourceand drain regions includes implanting ions in the outer semiconductorlayer before the removing the at least a portion of the embeddeddisposable layer.
 6. The method according to claim 1, wherein: thesubstrate includes isolation regions; and the removing at least aportion of the disposable layer includes forming recesses in saidisolation regions, and removing at least a portion of the disposablelayer via said recesses.
 7. The method according to claim 6, wherein thedepositing includes depositing said material in the void via saidrecesses.
 8. The method according to claim 6, wherein the depositing amaterial in the void includes adding end caps in said recesses atlateral ends of the stress liner.
 9. The method according to claim 1,wherein the disposable layer is a SiGe layer.
 10. The method accordingto claim 1, wherein the depositing a stress inducing material includesdepositing the stress inducing material in the void wherein the stressinducing material is contiguous with the out semiconductor layer.
 11. Amethod of forming a plurality of transistors in an integrated circuitincluding a semiconductor substrate having an inner semiconductor layer,an outer semiconductor layer, and an embedded disposable layer abovesaid inner semiconductor layer and beneath said outer semiconductorlayer, the method comprising: forming a P-type transistor and an N-typetransistor on the outer semiconductor layer of the substrate; andremoving at least a portion of the disposable layer to form a voidwithin the substrate, below said outer semiconductor layer; depositingstress inducing materials in said void to form a compressive stressliner and a tensile stress liner therein, wherein the P-type transistoris directly above the compressive stress liner and the N-type transistoris directly above the tensile stress liner; and during said depositing,the outer semiconductor layer of the substrate maintaining thetransistors separated from the stress liners.
 12. The method accordingto claim 11, wherein: the forming a p-type transistor and a N-typetransistor includes: forming a plurality of gate dielectrics above theouter semiconductor layer; and the removing includes removing the atleast a portion of the embedded disposable layer after forming the gatedielectrics.
 13. The method according to claim 12, wherein the forming ap-type transistor and an N-type transistor includes: forming source anddrain regions in the outer semiconductor layer; and activating thesource and drain regions after removing the at least a portion of theembedded disposable layer.
 14. The method according to claim 13, whereinthe depositing a stress inducing material includes depositing the stressinducing material in the void after activating the source and drainregions.
 15. The method according to claim 14, wherein the formingsource and drain regions includes implanting ions in the outersemiconductor layer before the removing the at least a portion of theembedded disposable layer.
 16. The method according to claim 11, whereinthe removing includes: forming recesses at lateral ends of the embeddeddisposable layer; and removing said at least a portion of the disposablelayer via said recesses.
 17. The method according to claim 16, whereinthe depositing includes depositing said material into said voids viasaid recesses.
 18. The method according to claim 12, wherein thedepositing includes: depositing a first material into said void via afirst of the recesses to form the compressive stress liner; anddepositing a second material into said void via a second of the recessesto from the tensile stress liner.
 19. The method according to claim 16,wherein the depositing further includes adding end caps, in saidrecesses, at lateral ends of the stress liners.
 20. The method accordingto claim 16, wherein the depositing a stress inducing material includesdepositing the stress inducing material in the void, wherein the stressinducing material is contiguous with the outer semiconductor layer.